240314-K3-1

Type: Synthesis

ObjectId: 62258

Created: 3/14/2024 3:01:11 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

[no file attached]

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Referenced Objects (Reverse Association)

  • 10252 240314-K3-1
    Sample

    La-Co-V-O hot dep 500°C on Sapphire (dsp) for band gap, 1h preanneal Co: DCXS-750, 70W; V: pulsed DC, 60W, 10kHz, 5µs, La2O3: RF, 200W, 20W/min ramp; Problems with pressure controller after 20min, continued with Ar/O2 flow of 40/20sccm, cathodes where shut down and start again to test gas flow values (for La2O3 with ramp of course), same issue after 8min (28min total) so process was canceled

All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
Float start vacuum 7.7e-008 Torr
Float process duration 3840 s
Float substrate temperature 500 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float substrate position 180 °
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 1
String target material Co
String target ID #14
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float voltage cathode 1 409 V
Float current cathode 1 0.173 A
Cathode 2
String target material V
String target ID #3
Mag2-Pulsed DC
Float ignition power cathode 2 70 W
Float pre clean power 2 60 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 60 W
Float voltage cathode 2 324 V
Float current cathode 2 0.18 A
Float frequency cathode 2 10000 Hz
Float pulse length cathode 2 5 µs
Cathode 3
String target material La2O3
String target ID #2
Mag3-RF
Float ignition power cathode 3 200 W
Float ramp power step cathode 3 20 W
Float duration per step cathode 3 60 s
Float pre clean power 3 200 W
Float pre clean time 3 600 s
Float pre clean pressure cathode 3 20 mTorr
Float power forward cathode 3 198 W
Float power reflected cathode 3 0 W
Float load cathode 3 30 %
Float tune cathode 3 26 %

The table

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