240403-K3-1

Type: Synthesis

ObjectId: 69972

Created: 4/3/2024 2:02:40 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Referenced Objects (Reverse Association)

  • 10303 240403-K3-1
    Sample

    La-Co-Fe-V-O RT deposition, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 60W, 10kHz, 5µs; Co: DCXS-750, 70W; Fe: DCXS-1500, 100W

All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
Float start vacuum 4.4e-008 Torr
Float process duration 7200 s
Float substrate temperature 25 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float substrate position 180 °
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 1
String target material Co
String target ID #14
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float voltage cathode 1 414 V
Float current cathode 1 0.169 A
Cathode 2
String target material V
String target ID #3
Mag2-Pulsed DC
Float ignition power cathode 2 70 W
Float pre clean power 2 60 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 60 W
Float voltage cathode 2 326 V
Float current cathode 2 0.18 A
Float frequency cathode 2 10000 Hz
Float pulse length cathode 2 5 µs
Cathode 3
String target material La2O3
String target ID #2
Mag3-RF
Float ignition power cathode 3 200 W
Float ramp power step cathode 3 20 W
Float duration per step cathode 3 60 s
Float pre clean power 3 200 W
Float pre clean time 3 600 s
Float pre clean pressure cathode 3 20 mTorr
Float power forward cathode 3 198 W
Float power reflected cathode 3 0 W
Float load cathode 3 29 %
Float tune cathode 3 26 %
Cathode 4
String target material Fe
String target ID #60
Mag4-DC
Float ignition power cathode 4 104 W
Float pre clean power 4 100 W
Float pre clean time 4 300 s
Float pre clean pressure cathode 4 20 mTorr
Float power cathode 4 100 W
Float voltage cathode 4 350 V
Float current cathode 4 288 A

The table

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