240408-K3-1

Type: Synthesis

ObjectId: 70353

Created: 4/8/2024 12:14:38 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Referenced Objects (Reverse Association)

  • 10315 240408-K3-1
    Sample

    La-Co-Fe-V-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 60W, 10kHz, 5µs, Co: DCXS-750, 70W; Fe: DCSX-1500, 100W; preanneal 1.5h; Water Interlock during process after 20 min, system was completely down, restarted, deposition was canceled, water filter was cleaned

All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
Float start vacuum 4e-008 Torr
Float process duration 10800 s
Float substrate temperature 500 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float substrate position 180 °
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 1
String target material Co
String target ID #14
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float voltage cathode 1 412 V
Float current cathode 1 0.171 A
Cathode 2
String target material V
String target ID #3
Mag2-Pulsed DC
Float ignition power cathode 2 70 W
Float pre clean power 2 60 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 60 W
Float voltage cathode 2 328 V
Float current cathode 2 0.18 A
Float frequency cathode 2 10000 Hz
Float pulse length cathode 2 5 µs
Cathode 3
String target material La2O3
String target ID #2
Mag3-RF
Float ignition power cathode 3 200 W
Float ramp power step cathode 3 20 W
Float duration per step cathode 3 60 s
Float pre clean power 3 200 W
Float pre clean time 3 600 s
Float pre clean pressure cathode 3 20 mTorr
Float power forward cathode 3 198 W
Float power reflected cathode 3 0 W
Float load cathode 3 29 %
Float tune cathode 3 27 %
Cathode 4
String target material Fe
String target ID #60
Mag4-DC
Float ignition power cathode 4 104 W
Float pre clean power 4 100 W
Float pre clean time 4 300 s
Float pre clean pressure cathode 4 20 mTorr
Float power cathode 4 100 W
Float voltage cathode 4 352 V
Float current cathode 4 0.288 A

The table

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