240618-K5-1

Type: Synthesis

ObjectId: 77129

Created: 6/18/2024 2:00:21 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

[no file attached]

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Include all template properties
Type Name Value Comment
general process parameters
String chamber K5 K<i> (for example, "K7")
Float start vacuum 1.1e-007 Torr
Float process duration 7200 s
Float substrate temperature 25 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 5 sccm
Float process pressure 15 mTorr
Float flow PG 40 sccm
target source configuration
Cathode 2
String target material Co
String target ID #3
Mag2-DC
Float ignition power cathode 2 60 W
Float pre clean power 2 60 W
Float pre clean time 2 900 s
Float pre clean pressure cathode 2 15 mTorr
Float power cathode 2 60 W
Float voltage cathode 2 374 V
Float current cathode 2 0.162 A
Cathode 3
String target material Ni
String target ID #13
Mag3-DC
Float ignition power cathode 3 60 W
Float pre clean power 3 60 W
Float pre clean time 3 900 s
Float pre clean pressure cathode 3 15 mTorr
Float power cathode 3 60 W
Float voltage cathode 3 339 V
Float current cathode 3 0.177 A

The table

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