240620-K7-1

Type: Synthesis

ObjectId: 78013

Created: 6/20/2024 4:02:01 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

[no file attached]

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Include all template properties
Type Name Value Comment
general process parameters
String chamber K7 K<i> (for example, "K7")
Float start vacuum 4.2e-006 Torr
Float process duration 3600 s
Float substrate temperature 25 °C
Float substrate rotation 0 RPM
String process gas Ar
Float substrate position 315 °
Float process pressure 3.7 mTorr
target source configuration
Cathode 1
String target material Fe
String target ID #8
Mag1-DC
Float ignition power cathode 1 20 W
Float pre clean power 1 20 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 10 mTorr
Float power cathode 1 25 W
Float current cathode 1 303 A
Float deposition rate 1 0.082 nm/s
Cathode 3
String target material Co
String target ID #2
Mag3-DC
Float ignition power cathode 3 20 W
Float pre clean power 3 20 W
Float pre clean time 3 300 s
Float pre clean pressure cathode 3 10 mTorr
Float power cathode 3 30 W
Float voltage cathode 3 292 V
Float current cathode 3 0.101 A

The table

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