240621-K7-1

Type: Synthesis

ObjectId: 78018

Created: 6/21/2024 1:14:22 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Include all template properties
Type Name Value Comment
general process parameters
String chamber K7 K<i> (for example, "K7")
Float start vacuum 2.2e-006 Torr
Float process duration 6000 s
Float substrate temperature 25 °C
Float substrate rotation 40 RPM
String process gas Ar
Float process pressure 3.7 mTorr
target source configuration
Cathode 2
String target material FeCo
String target ID #1
Mag2-DC
Float ignition power cathode 2 20 W
Float pre clean power 2 20 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 10 mTorr
Float power cathode 2 30 W
Float voltage cathode 2 312 V
Float current cathode 2 0.095 A

The table

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