240807-K3-1

Type: Synthesis

ObjectId: 87272

Created: 8/7/2024 9:14:03 AM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Referenced Objects (Reverse Association)

  • 10491 240807-K3-1
    Sample

    500°C hot deposition on Sapphire (ssp), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 70W, Ni: RF, 140W

All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
String chamber K3 K<i> (for example, "K7")
Float start vacuum 1.7e-008 Torr
Float process duration 7200 s
Float substrate temperature 500 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float substrate position 180 °
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 1
String target material Co
String target ID #10
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float voltage cathode 1 353 V
Float current cathode 1 0.199 A
Cathode 2
String target material Ni
String target ID #8
Mag2-RF
Float ignition power cathode 2 140 W
Float pre clean power 2 140 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power forward cathode 2 138 W
Float power reflected cathode 2 0 W
Float voltage cathode 2 82 V
Float load cathode 2 21 %
Float tune cathode 2 30 %
Cathode 3
String target material Mn
String target ID #3
Mag3-Pulsed DC
Float ignition power cathode 3 100 W
Float ramp power step cathode 3 20 W
Float duration per step cathode 3 60 s
Float pre clean power 3 100 W
Float pre clean time 3 300 s
Float pre clean pressure cathode 3 20 mTorr
Float power cathode 3 100 W
Float voltage cathode 3 329 V
Float current cathode 3 0.3 A
Float frequency cathode 3 10000 Hz
Float pulse length cathode 3 5 µs
Cathode 4
String target material Fe
String target ID #70
Mag4-DC
Float ignition power cathode 4 100 W
Float pre clean power 4 60 W
Float pre clean time 4 300 s
Float pre clean pressure cathode 4 20 mTorr
Float power cathode 4 60 W
Float voltage cathode 4 355 V
Float current cathode 4 0.173 A

The table

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