240809-K3-2

Type: Synthesis

ObjectId: 87283

Created: 8/9/2024 2:27:26 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Referenced Objects (Reverse Association)

  • 10494 240809-K3-2
    Sample

    500°C hot deposition on Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240730-K7-2), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 70W, Ni: RF, 210W

All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
String chamber K3 K<i> (for example, "K7")
Float start vacuum 2e-008 Torr
Float process duration 1920 s
Float substrate temperature 500 °C
Float substrate rotation 0 RPM
String process gas ar
String reactive gas 1 o2
Float flow RG 1 40 sccm
Float table height 25 mm
Float substrate position 180 °
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 1
String target material Co
String target ID #10
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float voltage cathode 1 347 V
Float current cathode 1 0.201 A
Cathode 2
String target material Ni
String target ID #8
Mag2-RF
Float ignition power cathode 2 100 W
Float pre clean power 2 210 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power forward cathode 2 208 W
Float power reflected cathode 2 0 W
Float voltage cathode 2 94 V
Float load cathode 2 20 %
Float tune cathode 2 30 %
Cathode 3
String target material Mn
String target ID #3
Mag3-Pulsed DC
Float ignition power cathode 3 100 W
Float duration per step cathode 3 20 s
Float pre clean power 3 60 W
Float pre clean time 3 300 s
Float pre clean pressure cathode 3 20 mTorr
Float power cathode 3 100 W
Float voltage cathode 3 328 V
Float current cathode 3 0.3 A
Float frequency cathode 3 10000 Hz
Float pulse length cathode 3 5 µs
Cathode 4
String target material Fe
String target ID #70
Mag4-DC
Float ignition power cathode 4 100 W
Float pre clean power 4 60 W
Float pre clean time 4 300 s
Float pre clean pressure cathode 4 20 mTorr
Float power cathode 4 60 W
Float voltage cathode 4 353 V
Float current cathode 4 0.173 A

The table

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