241113-K3-1

Type: Synthesis

ObjectId: 109092

Created: 11/13/2024 1:17:41 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Referenced Objects (Reverse Association)

  • 10677 241113-K3-1
    Sample

    La-Co-Fe-Ni-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, Fe: DCSX-1500, 100W, preanneal 1h

All properties (except table)

Include all template properties
Type Name Value Comment
general process parameters
String chamber K3 K<i> (for example, "K7")
String operator Patrick Marx
Float start vacuum 3.4e-008 Torr
Float process duration 7200 s
Float substrate temperature 500 °C
Float substrate rotation 0 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float cathode tilt 7.5 mm
Float substrate position 0 °
Float process pressure 3 mTorr
Float flow PG 80 sccm
Float preheat duration 60 min
target source configuration
Cathode 1
String target material Co
String target ID #10
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 180 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float set power cathode 1 70 W
Float act power cathode 1 70 W
Float voltage cathode 1 345 V
Float current cathode 1 0.204 A
Cathode 2
String target material Ni
String target ID #13
Mag2-Pulsed DC
Float ignition power cathode 2 100 W
Float pre clean power 2 100 W
Float pre clean time 2 180 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 100 W
Float set power cathode 2 100 W
Float act power cathode 2 101 W
Float voltage cathode 2 139 V
Float current cathode 2 0.73 A
Float frequency cathode 2 350000 Hz
Float pulse length cathode 2 1.4 µs
Cathode 3
String target material La2O3
String target ID #1
Mag3-RF
Float ignition power cathode 3 200 W
Float ramp power step cathode 3 20 W
Float duration per step cathode 3 60 s
Float pre clean power 3 200 W
Float pre clean time 3 600 s
Float pre clean pressure cathode 3 20 mTorr
Float power forward cathode 3 200 W
Float set power forward cathode 3 200 W
Float act power forward cathode 3 198 W
Float power reflected cathode 3 0 W
Float voltage cathode 3 0 V
Float load cathode 3 32 %
Float tune cathode 3 27 %
Cathode 4
String target material Fe
String target ID #71
Mag4-DC
Float ignition power cathode 4 100 W
Float pre clean power 4 100 W
Float pre clean time 4 180 s
Float pre clean pressure cathode 4 20 mTorr
Float power cathode 4 100 W
Float set power cathode 4 100 W
Float act power cathode 4 99 W
Float voltage cathode 4 383 V
Float current cathode 4 0.261 A

The table

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