241126-K3-1

Type: Synthesis

ObjectId: 109525

Created: 11/26/2024 8:41:54 AM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Type Name Value Comment
general process parameters
String chamber K3 K<i> (for example, "K7")
String operator Patrick Marx
Float start vacuum 1.7e-008 Torr
Float process duration 7200 s
Float substrate temperature 500 °C
Float substrate rotation 20 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 25 mm
Float cathode tilt 7.5 mm
Float process pressure 3 mTorr
Float flow PG 80 sccm
Float preheat duration 60 min
target source configuration
Cathode 1
String target material Co
String target ID #10
Mag1-Pulsed DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 180 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float set power cathode 1 70 W
Float act power cathode 1 70 W
Float voltage cathode 1 110 V
Float current cathode 1 0.64 A
Float frequency cathode 1 350000 Hz
Float pulse length cathode 1 1.4 µs

The table

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