250808-K3-1

Type: Synthesis show more

ObjectId: 134313

Created: 8/8/2025 12:50:33 PM by Kaiser Cedric [Cedric.Kaiser@Ruhr-Uni-Bochum.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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11081 250808-K3-1
Sample
Co-Ni-O RT, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, 40sccm Ar 20sccm O2

Type	Name	Value	Comment
Int	Main4Printing	1	Set it up to 1 for the main synthesis document for printing
general process parameters
String	chamber	K3	K<i> (for example, "K7")
String	operator	Patrick, Cedric
Float	start vacuum	7.7e-008	Torr
Float	process duration	5400	s
Float	substrate temperature	25	°C
String	process gas	Ar
String	reactive gas 1	O2
Float	flow RG 1	20	sccm
Float	table height	25	mm
Float	cathode tilt	7.5	mm
Float	substrate position	0	°
Float	process pressure	3	mTorr
Float	flow PG	40	sccm
target source configuration
Cathode 1
String	target material	Co
String	target ID	#10
Mag1-DC
Float	ignition power cathode 1	70	W
Float	pre clean power 1	70	W
Float	pre clean time 1	300	s
String	pre clean pressure cathode 1	20	mTorr
Float	power cathode 1	70	W
Float	set power cathode 1	71	W
Float	act power cathode 1	70	W
Float	voltage cathode 1	337	V
Float	current cathode 1	0.21	A
Cathode 2
String	target material	Ni
String	target ID	#7
Mag2-Pulsed DC
Float	ignition power cathode 2	100	W
Float	pre clean power 2	100	W
Float	pre clean time 2	300	s
Float	pre clean pressure cathode 2	20	mTorr
Float	power cathode 2	100	W
Float	set power cathode 2	100	W
Float	act power cathode 2	100	W
Float	voltage cathode 2	135	V
Float	current cathode 2	0.74	A
Float	frequency cathode 2	350000	Hz
Float	pulse length cathode 2	1.4	µs

No properties for rendering in a table found