260903-K3-1

Type: Synthesis

ObjectId: 245335

Created: 9/3/2026 12:13:20 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

[no file attached]

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Referenced Objects (Reverse Association)

  • 11721 260903-K3-1
    Sample

    Co-O hot dep, 950°C (heater setpoint), 20rpm, Co: 70W DC; Test of the new heater; Sr/O2 80/40; actual temperature indicated by the heater: 910°C

All properties (except table)

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Type Name Value Comment
general process parameters
String chamber K3 K<i> (for example, "K7")
Int problem occured? 1 1 - Yes, 0 - No
String problem description heater does not rech setpoint temperature, 950°C set, 910 actual temperature
String operator Patrick Marx
Float start vacuum 8.8e-008 Torr
Float process duration 7200 s
Float substrate temperature 950 °C
Float substrate rotation 20 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 40 sccm
Float table height 18 mm
Float cathode tilt 7.5 mm
Float process pressure 3 mTorr
Float flow PG 80 sccm
Float preheat duration 75 min
target source configuration
Cathode 1
String target material Co
String target ID #10
Mag1-DC
Float ignition power cathode 1 70 W
Float pre clean power 1 70 W
Float pre clean time 1 180 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 70 W
Float set power cathode 1 68 W
Float act power cathode 1 67 W
Float voltage cathode 1 343 V
Float current cathode 1 0.197 A

The table

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