K3 Co-oxide hot dep.

Type: Synthesis

ObjectId: 59579

Created: 1/25/2024 11:10:44 AM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Type Name Value Comment
general process parameters
Float start vacuum 2.3e-005 Torr
Float process duration 10800 s
Float substrate temperature 500 °C
Float substrate rotation 24 RPM
String process gas Ar
String reactive gas 1 O2
Float flow RG 1 37 sccm
Float table height 25 mm
Float process pressure 3 mTorr
Float flow PG 80 sccm
target source configuration
Cathode 4
String target material Co
String target ID 13
Mag4-DC
Float ignition power cathode 4 100 W
Float power cathode 4 130 W
Float voltage cathode 4 436 V
Float current cathode 4 0.302 A

The table

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