Thin film libraries dataset (before FP3)

Type: Idea or experiment plan show more

ObjectId: 249200

Created: 9/16/2026 3:45:54 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Updated: 9/21/2026 10:24:02 AM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

[no file attached]

Associated Objects

10157 Co-oxide Hot deposition 500°C (homogeneous)
Sample
preanneal 500 °C 55 min
10229 240306-K3-1
Sample
Deposition for rate at RT on crosses wafer; La2O3: RF, 200W, 20W/min ramp; Co: DC-750, 70W; V: pulsed DC, 60W
10241 240312-K3-1
Sample
La-Co-V-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10246 240313-K3-1
Sample
La-Co-V-O hot dep for electrochemistry, 1h preanneal on Si/SiO2 with 50 nm Pt on 10nm Ta, Co: DCXS-750, 70W, V: pulsed DC, 10kHz, 5µs, La2O3: RF, 200W, 20W/min ramp
10252 240314-K3-1
Sample
La-Co-V-O hot dep 500°C on Sapphire (dsp) for band gap, 1h preanneal Co: DCXS-750, 70W; V: pulsed DC, 60W, 10kHz, 5µs, La2O3: RF, 200W, 20W/min ramp; Problems with pressure controller after 20min, continued with Ar/O2 flow of 40/20sccm, cathodes where shut down and start again to test gas flow values (for La2O3 with ramp of course), same issue after 8min (28min total) so process was canceled
10256 240315-K3-1
Sample
La-Co-V-O hot dep 500°C on Sapphire (dsp) for band gap, 1h preanneal Co: DCXS-750, 70W; V: pulsed DC, 60W, 10kHz, 5µs, La2O3: RF, 200W, 20W/min ramp
10266 240318-K3-1
Sample
La-Co-V-O hot dep TEST, 1h preanneal, on Si/SiO2 with 50 nm Pd, Co: DCXS-750, 70W, V: pulsed DC, 10kHz, 5µs, La2O3: RF, 200W, 20W/min ramp
10267 240319-K3-1
Sample
La-Co-V-O hot deposition 500°C on Sapphire, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 10kHz, 5µs, Co: DCXS-750, 70W, preanneal 1h
10270 240320-K3-1
Sample
La-Co-V-O hot deposition 500°C on Si/SiO2, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 80W, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 2h
10287 240326-K3-1
Sample
La-Co-V-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 120W, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10293 240327-K3-1
Sample
La-Co-V-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 120W, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10295 240328-K3-1
Sample
La-Co-V-O hot deposition 500°C on Sapphire (dsp), La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 120W, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10298 240402-K3-1
Sample
La-Co-V-O hot deposition 500°C on Si/SiO2 with 50 nm Pt and 10 nm Ta adhesion layer, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 120W, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10303 240403-K3-1
Sample
La-Co-Fe-V-O RT deposition, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 60W, 10kHz, 5µs; Co: DCXS-750, 70W; Fe: DCXS-1500, 100W
10316 240409-K3-1
Sample
La-Co-Fe-V-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 60W, 10kHz, 5µs, Co: DCXS-750, 70W; Fe: DCSX-1500, 100W; preanneal 1h
10317 240410-K3-1
Sample
La-Co-Fe-V-O hot deposition 500°C for bandgap, La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 60W, 10kHz, 5µs, Co: DCXS-750, 70W; Fe: DCSX-1500, 100W; preanneal 1h
10318 240410-K3-2
Sample
La-Co-Fe-V-O hot deposition 500°C for EC on SiSiO2 + 50 nm Pt (on 10 nm Ta), La2O3: RF, 200W, 20W/min ramp, V: pulsed DC, 60W, 10kHz, 5µs, Co: DCXS-750, 70W; Fe: DCSX-1500, 100W; preanneal 1h
10404 240618-K5-1
Sample
Co-Ni-O RT deposition on crosses wafer; Co: MAG2, DC1, 60W; Ni: MAG3, DC2, 60W
10408 240619-K5-1
Sample
Co-Ni-O hot deposition 500°C (710°C set on PC, 2,25h preanneal) on Sapphire (ssp); Co: MAG2, DC1, 40W; Ni: MAG3, DC2, 70W
10432 240701-K5-1
Sample
Co-Ni-O hot deposition 500°C (710°C set on PC, 2h preanneal) on Si/SiO2; Co: MAG2, DC1, 40W; Ni: MAG3, DC2, 70W
10448 240705-K5-1
Sample
Co-Ni-O hot deposition 500°C (710°C set on PC, 2h preanneal) on Sapphire (dsp); Co: MAG2, DC1, 40W; Ni: MAG3, DC2, 70W
10462 240709-K5-1
Sample
Co-Ni-O hot deposition 500°C (710°C set on PC, 2h preanneal) on Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240624-K7-1); Co: MAG2, DC1, 40W; Ni: MAG3, DC2, 70W
10466 240711-K5-1
Sample
Co-Ni-O hot deposition 500°C (710°C set on PC, 2h preanneal) on Sapphire (ssp); Co: MAG2, DC1, 60W; Ni: MAG3, DC2, 55W
10469 240715-K5-1
Sample
Co-Ni-O hot deposition 500°C (710°C set on PC, 2h preanneal) on Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240624-K7-1); Co: MAG2, DC1, 60W; Ni: MAG3, DC2, 55W
10474 240723-K3-1
Sample
Deposition for rate at RT on crosses wafer; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp
10475 240724-K3-1
Sample
500°C hot deposition on Sapphire (ssp), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp
10478 240725-K3-1
Sample
500°C hot deposition on Sapphire (dsp) for band gap, 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp
10479 240726-K3-1
Sample
500°C hot deposition on Si/SIO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240625-K7-1), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp
10480 240729-K3-1
Sample
500°C hot deposition on Sapphire (ssp), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Ni: DCXS-1500, 70W
10481 240730-K3-1
Sample
500°C hot deposition on Sapphire (dsp) for band gap, 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Ni: DCXS-1500, 70W
10482 240731-K3-1
Sample
500°C hot deposition on Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240729-K7-1), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Ni: DCXS-1500, 70W
10484 240801-K3-1
Sample
500°C hot deposition on Sapphire (ssp), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 60W
10486 240802-K3-2
Sample
500°C hot deposition on Sapphire (dsp) for band gap, 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 60W
10488 240806-K3-1
Sample
500°C hot deposition on Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240730-K7-1), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 60W
10491 240807-K3-1
Sample
500°C hot deposition on Sapphire (ssp), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 70W, Ni: RF, 140W
10492 240808-K3-1
Sample
500°C hot deposition on Sapphire (ssp), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 70W, Ni: RF, 210W
10493 240809-K3-1
Sample
500°C hot deposition on Sapphire (dsp) for bandgap, 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 70W, Ni: RF, 210W
10494 240809-K3-2
Sample
500°C hot deposition on Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240730-K7-2), 1h preannealing; Co: DC-750, 70W; Mn: pulsed DC, 100W, 10kHz, 5µs, 20W/min ramp, Fe: DCXS-1500, 70W, Ni: RF, 210W
10667 241105-K3-1
Sample
La-Co-V-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, Ni: 70W, pulsed DC, 10kHz, 5µs, Co: DCXS-750, 70W, preanneal 1h
10669 241106-K3-1
Sample
La-Co-V-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, Ni: 70W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10670 241107-K3-1
Sample
La-Co-V-O hot deposition 500°C onn Sapphire (dsp) for band gap, La2O3: RF, 200W, 20W/min ramp, Ni: 70W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10671 241108-K3-1
Sample
La-Co-V-O hot deposition 500°C on Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240731-K7-1), La2O3: RF, 200W, 20W/min ramp, Ni: 70W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, preanneal 1h
10674 241111-K3-1
Sample
La-Co-Fe-Ni-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, Ni: 70W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, Fe: DCSX-1500, 100W, preanneal 1h
10677 241113-K3-1
Sample
La-Co-Fe-Ni-O hot deposition 500°C, La2O3: RF, 200W, 20W/min ramp, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, Fe: DCSX-1500, 100W, preanneal 1h
10678 241114-K3-1
Sample
La-Co-Fe-Ni-O hot deposition 500°C for band gap, La2O3: RF, 200W, 20W/min ramp, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, Fe: DCSX-1500, 100W, preanneal 1h
10680 241115-K3-1
Sample
La-Co-Fe-Ni-O hot deposition 500°C Si/SiO2 with Pt-electrode layer (50nm Pt on 10nm Ta, 240731-K7-2), La2O3: RF, 200W, 20W/min ramp, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, Fe: DCSX-1500, 100W, preanneal 1h
10698 241126-K3-1
Sample
Co-O hot dep, 500°C, 20rpm, Co: 70W pulsed DC, 350kHz, 1.4µs
10727 241203-K3-1
Sample
Co-O hot dep, 500°C, 20rpm, Co: 70W DC
11070 250731-K3-1
Sample
Co-Ni-O RT, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, 40sccm Ar 20sccm O2
11081 250808-K3-1
Sample
Co-Ni-O RT, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, 40sccm Ar 20sccm O2
11083 250813-K3-1
Sample
Co-Ni-O RT, Ni: 100W, pulsed DC, 350kHz, 1.4µs, Co: DCXS-750, 70W, 40sccm Ar 5sccm O2
11642 260710-K3-1
Sample
Co-O deposition on Sapphire at RT for post annealing

All properties (except table)

Type	Name	Value	Comment
Measurements Report
Int	Photo	1	TypeIds CSV to include in the report column (1 - include to report):, 12
Int	EDX	1	TypeIds CSV to include in the report column (1 - include to report):, 13, 15, 19, 53, 78, 79
Int	XRD	1	TypeIds CSV to include in the report column (1 - include to report):, 17, 31, 44, 55, 56, 67, 97, 109, 110, 136
Int	Thickness	1	TypeIds CSV to include in the report column (1 - include to report):, 27, 38, 39, 40
Int	Resistance	1	TypeIds CSV to include in the report column (1 - include to report):, 14, 16, 33
Int	Bandgap	1	TypeIds CSV to include in the report column (1 - include to report):, 41, 80, 81, 82, 130
Int	SDC	1	TypeIds CSV to include in the report column (1 - include to report):, 57, 58, 85, 108, 131

The table

Download properties in Excel

No properties for rendering in a table found

Report (Samples and Measurements)

SampleId	ObjectName	N	System	SubstrateMaterial	Photo	EDX	XRD	Thickness	Resistance	Bandgap	SDC
10157	10157 Co-oxide Hot deposition 500°C (homogeneous)	2	Co-O	Sapphire	1	1	1	0	1	0	0
10229	10229 240306-K3-1	4	Co-La-O-V	Si + SiO2 (cross-patterned)	1	0	0	1	0	0	0
10241	10241 240312-K3-1	4	Co-La-O-V		1	2	1	0	0	0	0
10246	10246 240313-K3-1	4	Co-La-O-V		1	1	0	0	0	0	1
10252	10252 240314-K3-1	4	Co-La-O-V	Sapphire	1	1	1	0	0	3	0
10256	10256 240315-K3-1	4	Co-La-O-V	Sapphire	1	1	0	0	0	3	0
10266	10266 240318-K3-1	4	Co-La-O-V		1	0	0	0	0	0	0
10267	10267 240319-K3-1	4	Co-La-O-V	Sapphire	1	1	2	0	1	0	0
10270	10270 240320-K3-1	4	Co-La-O-V		3	1	0	0	1	0	0
10287	10287 240326-K3-1	4	Co-La-O-V		1	1	1	0	1	0	0
10293	10293 240327-K3-1	4	Co-La-O-V	Sapphire	1	1	2	0	1	0	0
10295	10295 240328-K3-1	4	Co-La-O-V	Sapphire	1	1	0	0	0	3	0
10298	10298 240402-K3-1	4	Co-La-O-V		1	1	0	0	0	0	1
10303	10303 240403-K3-1	5	Co-Fe-La-O-V	Si + SiO2 (cross-patterned)	1	1	0	1	0	0	0
10316	10316 240409-K3-1	5	Co-Fe-La-O-V	Sapphire	1	1	2	0	1	0	0
10317	10317 240410-K3-1	5	Co-Fe-La-O-V	Sapphire	1	1	0	0	0	3	0
10318	10318 240410-K3-2	5	Co-Fe-La-O-V		1	1	0	0	0	0	1
10404	10404 240618-K5-1	3	Co-Ni-O	Sapphire (cross-patterned)	0	1	0	1	0	0	0
10408	10408 240619-K5-1	3	Co-Ni-O	Sapphire	1	1	2	0	1	0	0
10432	10432 240701-K5-1	3	Co-Ni-O		1	1	1	0	1	0	0
10448	10448 240705-K5-1	3	Co-Ni-O	Sapphire	1	1	0	0	0	3	0
10462	10462 240709-K5-1	3	Co-Ni-O		3	1	0	0	0	0	1
10466	10466 240711-K5-1	3	Co-Ni-O	Sapphire	1	1	2	0	1	0	0
10469	10469 240715-K5-1	3	Co-Ni-O		4	1	1	0	0	0	0
10474	10474 240723-K3-1	3	Co-Mn-O	Si + SiO2 (cross-patterned)	0	1	0	0	0	0	0
10475	10475 240724-K3-1	3	Co-Mn-O	Sapphire	1	1	2	0	2	0	0
10478	10478 240725-K3-1	3	Co-Mn-O	Sapphire	1	1	0	0	0	3	0
10479	10479 240726-K3-1	3	Co-Mn-O		3	1	0	0	0	0	0
10480	10480 240729-K3-1	4	Co-Mn-Ni-O	Sapphire	1	1	2	0	2	0	0
10481	10481 240730-K3-1	4	Co-Mn-Ni-O	Sapphire	1	1	0	0	0	3	0
10482	10482 240731-K3-1	4	Co-Mn-Ni-O		2	1	0	0	0	0	0
10484	10484 240801-K3-1	4	Co-Fe-Mn-O	Sapphire	1	1	2	0	2	0	0
10486	10486 240802-K3-2	4	Co-Fe-Mn-O	Sapphire	1	1	0	0	0	3	0
10488	10488 240806-K3-1	4	Co-Fe-Mn-O		3	1	0	0	0	0	0
10491	10491 240807-K3-1	5	Co-Fe-Mn-Ni-O	Sapphire	1	1	1	0	2	0	0
10492	10492 240808-K3-1	5	Co-Fe-Mn-Ni-O	Sapphire	1	1	2	0	2	0	0
10493	10493 240809-K3-1	5	Co-Fe-Mn-Ni-O	Sapphire	1	1	0	0	0	3	0
10494	10494 240809-K3-2	5	Co-Fe-Mn-Ni-O		2	1	0	0	0	0	0
10667	10667 241105-K3-1	4	Co-La-Ni-O	Sapphire	1	1	1	0	1	0	0
10669	10669 241106-K3-1	4	Co-La-Ni-O	Sapphire	1	1	3	0	2	0	0
10670	10670 241107-K3-1	4	Co-La-Ni-O	Sapphire	1	1	1	0	0	5	0
10671	10671 241108-K3-1	4	Co-La-Ni-O		3	2	3	0	0	0	2
10674	10674 241111-K3-1	5	Co-Fe-La-Ni-O	Sapphire	1	1	2	0	2	0	0
10677	10677 241113-K3-1	5	Co-Fe-La-Ni-O	Sapphire	1	1	3	0	2	0	0
10678	10678 241114-K3-1	5	Co-Fe-La-Ni-O	Sapphire	1	1	0	0	0	4	0
10680	10680 241115-K3-1	5	Co-Fe-La-Ni-O		3	2	3	0	0	0	0
10698	10698 241126-K3-1	2	Co-O	Sapphire	1	0	1	0	0	0	0
10727	10727 241203-K3-1	2	Co-O	Sapphire	1	0	2	0	0	0	0
11070	11070 250731-K3-1	3	Co-Ni-O	Si + SiO2 (cross-patterned)	1	2	1	0	2	0	0
11081	11081 250808-K3-1	3	Co-Ni-O	Sapphire	1	2	1	0	2	3	0
11083	11083 250813-K3-1	3	Co-Ni-O	Si + SiO2 (cross-patterned)	1	1	1	0	2	0	0
11642	11642 260710-K3-1	2	Co-O	Sapphire	1	0	0	0	0	0	0

Thin film libraries dataset (before FP3)

Associated Objects

10157 Co-oxide Hot deposition 500°C (homogeneous)

10229 240306-K3-1

10241 240312-K3-1

10246 240313-K3-1

10252 240314-K3-1

10256 240315-K3-1

10266 240318-K3-1

10267 240319-K3-1

10270 240320-K3-1

10287 240326-K3-1

10293 240327-K3-1

10295 240328-K3-1

10298 240402-K3-1

10303 240403-K3-1

10316 240409-K3-1

10317 240410-K3-1

10318 240410-K3-2

10404 240618-K5-1

10408 240619-K5-1

10432 240701-K5-1

10448 240705-K5-1

10462 240709-K5-1

10466 240711-K5-1

10469 240715-K5-1

10474 240723-K3-1

10475 240724-K3-1

10478 240725-K3-1

10479 240726-K3-1

10480 240729-K3-1

10481 240730-K3-1

10482 240731-K3-1

10484 240801-K3-1

10486 240802-K3-2

10488 240806-K3-1

10491 240807-K3-1

10492 240808-K3-1

10493 240809-K3-1

10494 240809-K3-2

10667 241105-K3-1

10669 241106-K3-1

10670 241107-K3-1

10671 241108-K3-1

10674 241111-K3-1

10677 241113-K3-1

10678 241114-K3-1

10680 241115-K3-1

10698 241126-K3-1

10727 241203-K3-1

11070 250731-K3-1

11081 250808-K3-1

11083 250813-K3-1

11642 260710-K3-1

All properties (except table)

The table

Report (Samples and Measurements)