Task 2.4: HE Oxides Changes under Reaction Conditions

Deposition of Cantor on a Ti adhesion layer

Deposition of a ~5nm Pt layer on a Cantor film.

1. Deposition of ~10nm Ti adhesion layer 2. Deposition of ~80nm HEA layer 3. Deposition of ~5nm Pt layer

Swapped Ru to DC and Co to RF since Ru comp in 11685 was onlz 2.6%