10229 240306-K3-1

Type: Sample

ObjectId: 62208 ExternalId: 10229

Created: 3/6/2024 2:12:16 PM by Marx Patrick [patrick.marx-l69@rub.de]

Updated: 9/16/2026 4:27:19 PM by Dudarev Victor gmail [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Deposition for rate at RT on crosses wafer; La2O3: RF, 200W, 20W/min ramp; Co: DC-750, 70W; V: pulsed DC, 60W

[no file attached]

: Co-La-O-V

Handovers

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Referenced Objects (Reverse Association)

All properties (except table)

Include all template properties
Type Name Value Comment
Int Type 1 Type of the physical sample --//required
Int Wafer ID 0 as engraved on the wafer (0 - no id) --//required & validationSchema=https://wafervalidation.matinf.pro/wafervalidation

The table

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